Health Effects
Silane toxic and also irritating to the eyes and respiratory system in part because of the formation of silicic acid on reaction with water.
RTECS Description: Mutagen
Carcinogenicity: IARC/NTC: Not listed as a human carcinogen
Exposure Limits:
ACGIH: TWA = 5.0 ppm
NIOSH REL = 5 ppm
IDLH = not determined
OSHA: None
Steri-Trac® SiH4 Monitor
Availability: Special Order
Specifications:*
Sensor type Electrochemical
Range: 0 – 50 ppm
Resolution: 0.1 ppm
Temp Range: -20 to +40 oC
Response time (t50): <60s (2 min exposure time)
Properties and Applications:
Silane is a pyrophoric gas at room temperature with a repulsive odor. Silane is used as s source of high purity silicon in semi-conductor and solar panel manufacture. It is also used to deposit thin layers of silica on surfaces.
Physical Properties:
Chemical Formula: SiH4
Physical form: Gas
MP: -185 oC
BP: -112 oC
Classification Numbers:
CAS No.: 7803-62-5
EC No.: n/a
RTECS: VV1400000
MW: 32.1 g/mol
Rel. Gas Density: 1.1(Air = 1)
Autoignition temp.: 21 oC
LEL: 1.37% v/v
*Specifications are subject to change
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